Laboratoire de Physique des Interfaces et des Couches Minces

CNRS - École polytechnique - Institut Polytechnique de Paris

Metrology of nano-objects with Mueller polarimetry

A)      Characterization of metrological targets (1D diffraction gratings, critical dimensions < 100 nm) in conical diffraction with spectroscopic MM polarimeter operating in visible wavelength range. Reflection of polarized light by 1D diffraction grating in conical diffraction configuration leads to the cross-talk of two polarization eigenstates that, in turn, results in all non-zero elements of Mueller […]