Laboratoire de Physique des Interfaces et des Couches Minces

CNRS - École polytechnique - Institut Polytechnique de Paris

Selective Area Deposition for Microelectronics

Introduction – A Novel Process Work is underway at the LPICM to invent and study techniques to produce Area Selective Deposition (where a film grows on one type of surface but not on another).  While this phenomenon is under investigation using Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD), we are investigating the use […]