Laboratoire de Physique des Interfaces et des Couches Minces
CNRS - École polytechnique - Institut Polytechnique de Paris
Introduction – A Novel Process Work is underway at the LPICM to invent and study techniques to produce Area Selective Deposition (where a film grows on one type of surface but not on another). While this phenomenon is under investigation using Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD), we are investigating the use […]