Laboratoire de Physique des Interfaces et des Couches Minces

CNRS - École polytechnique - Institut Polytechnique de Paris

Physical Vapour Deposition (PVD) Reactors

Sputtering Deposition LPICM has developed significant know-how in the deposition by sputtering of Transparent Conductive Oxides (TCO) and thin metallic films for electronic and optical applications.  Examples of applications include electrical contacts for photovoltaics, optoelectronic transition layers for superconductors, optical layers on quartz, and mirrors. Two sputtering tools are available at the LPICM – the […]